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Title:
SUBSTRATE TRANSFER ROBOT
Document Type and Number:
WIPO Patent Application WO/2017/122990
Kind Code:
A1
Abstract:
A substrate transfer robot is disclosed. In the substrate transfer robot, according to the present invention, a ball screw of a raising and lowering part is fixed, a ball nut is rotatably provided to the ball screw so as to be raised and lowered along the ball screw while rotating forward or backward, and a substrate supporting part is raised and lowered by the raising and lowering of the ball nut, wherein the long ball screw does not rotate so as to be prevented from being damaged by vibrational rotation, such that the ball screw can be formed to have a relatively long length. Therefore, raising the raising and lowering height of the substrate supporting part can be relatively less restricted. In addition, since the ball screw does not rotate, the ball screw can be easily provided.

Inventors:
KIM TAE HYUN (KR)
KIM JONG WOOK (KR)
HAN SUNG WOOK (KR)
KANG YUN SIK (KR)
Application Number:
KR2017/000333
Publication Date:
July 20, 2017
Filing Date:
January 10, 2017
Export Citation:
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Assignee:
HYUNDAI ROBOTICS CO LTD (KR)
International Classes:
B65G49/06; B25J11/00; B25J18/04; B65G47/90; F16H9/12; F16H25/20; F16H25/22; H01L21/677
Foreign References:
KR101506188B12015-03-26
KR101198876B12012-11-07
KR20030086029A2003-11-07
KR20150097298A2015-08-26
KR101350021B12014-01-16
Attorney, Agent or Firm:
ASTRAN INT'L IP GROUP (KR)
특허법인 천문 (KR)
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