Title:
SUBSTRATE TRANSFER SHUTTLE
Document Type and Number:
WIPO Patent Application WO1999059928
Kind Code:
A3
Abstract:
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.
Inventors:
WHITE JOHN M
TURNER NORMAN L
TINER ROBIN L
KELLER ERNST
KURITA SHINICHI
BLONIGAN WENDELL T
BERKSTRESSER DAVID E
TURNER NORMAN L
TINER ROBIN L
KELLER ERNST
KURITA SHINICHI
BLONIGAN WENDELL T
BERKSTRESSER DAVID E
Application Number:
PCT/IB1999/001431
Publication Date:
October 26, 2000
Filing Date:
May 14, 1999
Export Citation:
Assignee:
APPLIED KOMATSU TECHNOLOGY INC (JP)
International Classes:
B65G49/07; B65G49/06; C03B25/08; C03B29/08; C03B35/14; C03B35/20; C03C17/00; F27D3/00; F27D5/00; H01L21/00; H01L21/02; H01L21/673; H01L21/677; (IPC1-7): H01L21/00
Domestic Patent References:
| WO1998002911A1 | 1998-01-22 |
Foreign References:
| US5110249A | 1992-05-05 | |||
| US5178638A | 1993-01-12 | |||
| US4749465A | 1988-06-07 | |||
| US5292393A | 1994-03-08 | |||
| US5170714A | 1992-12-15 | |||
| US5571325A | 1996-11-05 | |||
| US5064337A | 1991-11-12 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 12 25 December 1997 (1997-12-25)
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