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Title:
SUBSTRATE TRANSFER SYSTEM AND METHOD
Document Type and Number:
WIPO Patent Application WO/2015/114850
Kind Code:
A1
Abstract:
This end effector (5) is provided with a first hand (8) and a second hand (9) which can be driven independently of each other. The first hand (8) has a hand body (10) which is insertable between vertically adjoined substrates housed in a substrate housing part, and holds a substrate (S) immediately over or under the hand body (10). The second hand (9) has a hand base part (11) at least a part of which advances under a lowermost substrate (S) or over an uppermost substrate (S) among a plurality of substrates (S) housed in the substrate housing part, and a substrate holding means (12) which is provided on the hand base part (11) to hold two or more substrates (S) including the lowermost or uppermost substrate (S). This end effector (5) makes it possible to transfer substrates without a hitch even if there is a restriction on using a batch transfer hand due to circumstances on the substrate housing part side.

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Inventors:
HASHIMOTO YASUHIKO (JP)
FUKUSHIMA TAKAYUKI (JP)
KANAMARU RYOSUKE (JP)
KINOSHITA SHINYA (JP)
MIYAGAWA DAIKI 宮川　大&#x
Application Number:
PCT/JP2014/067235
Publication Date:
August 06, 2015
Filing Date:
June 27, 2014
Export Citation:
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Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J15/08; H01L21/02
Domestic Patent References:
WO2010103876A12010-09-16
WO2013021645A12013-02-14
Foreign References:
JP2005116807A2005-04-28
JP2010179420A2010-08-19
JP2006205264A2006-08-10
JPH08139160A1996-05-31
JP2002231787A2002-08-16
JP2003309166A2003-10-31
JP2925329B21999-07-28
JPH05235147A1993-09-10
JPH11163096A1999-06-18
JP2001118909A2001-04-27
JP2001291759A2001-10-19
JP2005340729A2005-12-08
Other References:
See also references of EP 3101684A4
Attorney, Agent or Firm:
NAZUKA Satoshi et al. (JP)
Noted mound 聡 (JP)
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