Title:
SUBSTRATE TRANSFER SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/117095
Kind Code:
A1
Abstract:
A substrate transfer system for holding a substrate using vacuum adsorption and equipped with: a plurality of adsorption pads which have adsorption surfaces having vacuum holes formed therein and projections formed thereon so as to surround the vacuum holes, and in a manner such that the top surfaces of the projections contact locations on the substrate separated from one another; an arm part for supporting the plurality of adsorption pads; and a vacuum device for setting the interior of a vacuum channel to a negative pressure relative to the surroundings thereof, and connected to the vacuum holes in the plurality of adsorption pads via the vacuum channel.
Inventors:
MORIMOTO YOSUKE (JP)
Application Number:
PCT/JP2015/051712
Publication Date:
July 28, 2016
Filing Date:
January 22, 2015
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
H01L21/677; B25J15/06; B65G49/06
Foreign References:
| US20050110292A1 | 2005-05-26 | |||
| JPH08236597A | 1996-09-13 | |||
| JPH06247507A | 1994-09-06 | |||
| JP2005123583A | 2005-05-12 | |||
| JP2008130800A | 2008-06-05 |
Attorney, Agent or Firm:
MIYOSHI, Hidekazu et al. (JP)
Hidekazu Miyoshi (JP)
Hidekazu Miyoshi (JP)
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