Title:
SUBSTRATE TRANSPORT DEVICE AND METHOD FOR DETERMINING POSITIONAL RELATIONSHIP BETWEEN SUBSTRATE TRANSPORT ROBOT AND SUBSTRATE CARRYING UNIT
Document Type and Number:
WIPO Patent Application WO/2019/064891
Kind Code:
A1
Abstract:
The invention comprises: a step of detecting, with an object detection sensor, a portion of the surface of a target in a plurality of rotational positions where a rotational position when the rotational axis of the target on a substrate carrying unit serves as the rotational center and/or a rotational position when a robot reference axis in a detection region serves as the rotation center is changed, wherein the portion of the surface of the target is positioned at the inner side of a predetermined circle, which is centered on the rotational axis, through which the target passes; a step of determining, for each of the plurality of rotational positions, a quantity correlated with a reference length, which represents the distance from the robot reference axis to the target when the target is detected with the object detection sensor; and a step of determining the positional relationship between the robot reference axis and the rotational axis on the basis of the rotational position, from among the plurality of rotation positions, for which the quantity correlated with the reference length is maximum or minimum.
Inventors:
YOSHIDA MASAYA
NOGUCHI KENJI
OKADA HIROYUKI
NOGUCHI KENJI
OKADA HIROYUKI
Application Number:
PCT/JP2018/028493
Publication Date:
April 04, 2019
Filing Date:
July 30, 2018
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J9/22; B65G49/07; H01L21/68
Foreign References:
| JP2014099576A | 2014-05-29 | |||
| JP2005101070A | 2005-04-14 | |||
| JP2002124556A | 2002-04-26 |
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
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