Title:
SUBSTRATE TRANSPORT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/188008
Kind Code:
A1
Abstract:
A substrate transport device capable of transporting a substrate with an upper surface that is difficult to hold by suction and capable of performing installation at a placement position inside a container is provided. Specifically, the substrate transport device transports the substrate from a first placement position to a second placement position and is provided with a transport rail installed in a straight line between the first placement position and the second placement position, and a transport means that holds an outer edge section of the substrate and slides the substrate along the transport rail. The transport means comprises a slide rail installed parallel to the transport rail, an arm unit movable along the slide rail, a first substrate holding section provided on the first placement position side of the arm unit, and a second substrate holding section provided on each of the two placement position sides.
Inventors:
KITAMURA KEN (JP)
HARE TAKASHI (JP)
TERADA KATSUMI (JP)
HARE TAKASHI (JP)
TERADA KATSUMI (JP)
Application Number:
PCT/JP2019/008314
Publication Date:
October 03, 2019
Filing Date:
March 04, 2019
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
H05K13/02; H01L21/50
Domestic Patent References:
| WO2015140995A1 | 2015-09-24 |
Foreign References:
| JPH09260896A | 1997-10-03 | |||
| JP2010161262A | 2010-07-22 | |||
| JP2010010531A | 2010-01-14 | |||
| JPH05178441A | 1993-07-20 |
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