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Title:
SUBSTRATE TRANSPORT ROBOT, AND METHOD FOR DETECTING SHIFTING OF OPTICAL AXIS OF SUBSTRATE-HOLDING HAND
Document Type and Number:
WIPO Patent Application WO/2019/216401
Kind Code:
A1
Abstract:
In this method for detecting shifting of an optical axis of a substrate-holding hand: a reference turning position of a hand, in which an ideal optical axis extends in a horizontal first direction, is acquired; a first target body is detected by a photoelectric sensor while the hand is caused to move, with reference to the reference turning position, in the radial direction about a turning axis to a prescribed first turning position; a first search process is performed to establish, as a detection position of the hand, a position in a horizontal second direction that is orthogonal to the first direction; a second search process similar to the first search process is performed with respect to a second target body; and the inclination of the optical axis from the ideal optical axis is detected on the basis of the difference between the detection positions established in the first search process and the second search process. The second-direction distances from the turning axis to the first target body and to the second target body are equal to each other, and the position of intersection between the optical axis and a first target on the hand and the position of intersection between the optical axis and a second target on the hand are different from each other.

Inventors:
OKADA HIROYUKI
YOSHIDA MASAYA
Application Number:
PCT/JP2019/018686
Publication Date:
November 14, 2019
Filing Date:
May 10, 2019
Export Citation:
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Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
B25J19/04; B25J13/08; H01L21/677; H01L21/68
Domestic Patent References:
WO2011061912A12011-05-26
WO2016178300A12016-11-10
WO2003022534A12003-03-20
WO2009145082A12009-12-03
Foreign References:
JP2008114348A2008-05-22
JP2004214462A2004-07-29
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
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