Title:
SUBSTRATE TRANSPORTING MECHANISM
Document Type and Number:
WIPO Patent Application WO/2010/139174
Kind Code:
A1
Abstract:
A substrate transporting mechanism (1) comprises a drive device, a main driving device (30), a bottom plate (10) and two secondary driving devices (20), wherein the secondary driving devices (20) comprise bearing boxes (201) connected to the bottom plate (10), magnetic driving shafts (202), first bevel gears (202a), first permanent-magnet gears (202b) and magnetic transmission units (203), the first bevel gears (202a) and the first permanent-magnet gears (202b) are fixed to the magnetic driving shafts (202), the magnetic transmission units (203) are pivoted to the bearing boxes (201) in parallel and provided with rollers (203e), the main driving device (30) is provided with the second bevel gears (30a) engaged with the first bevel gears (202a), the magnetic transmission units(203) are provided with the second permanent-magnet gears (203b) which are vertical to the first permanent-magnet gears axially, the first permanent-magnet gears drive the second permanent-magnet gears by magnetic field. The noise generated by the substrate transporting mechanism is reduced and the substrate transporting process is performed in high clean environment.
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Inventors:
YEUNG, Mingsang (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
杨明生 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
FAN, Kaileung (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
范继良 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
杨明生 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
FAN, Kaileung (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
范继良 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
Application Number:
CN2009/076057
Publication Date:
December 09, 2010
Filing Date:
December 25, 2009
Export Citation:
Assignee:
DONGGUAN ANWELL DIGITAL MACHINERY CO., LTD. (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
东莞宏威数码机械有限公司 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
YEUNG, Mingsang (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
杨明生 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
FAN, Kaileung (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
东莞宏威数码机械有限公司 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
YEUNG, Mingsang (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
杨明生 (中国广东省东莞市南城区宏图高新科技开发区, Guangdong 0, 523080, CN)
FAN, Kaileung (Hongtu Hi-tech Development Zone, NanchengDongguan, Guangdong 0, 523080, CN)
International Classes:
B65G49/06; B65G13/02; B65G13/06; H01L51/56
Attorney, Agent or Firm:
GUANGZHOU SCIHEAD PATENT AGENT CO., LTD. (Room 1508, Huihua Commercial & Trade BuildingNo. 80, XianLie Zhong Road, Yuexiu Distric, Guangzhou Guangdong 0, 510070, CN)
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