Title:
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/105072
Kind Code:
A1
Abstract:
A substrate treating apparatus (1) is provided with: a bath (11) wherein a substrate treatment solution (TL) is supplied thereto, and a substrate (PB) is immersed in the supplied substrate treatment solution (TL); and a holding section (13) which holds the substrate (PB) such that the surface of the substrate (PB) disposed in the bath (11) is substantially parallel to the vertical direction. The treating apparatus (1) is configured such that, when the substrate treatment solution (TL) is made to flow from the supply port (111) of the bath (11) toward the discharge port (112) thereof, the substrate treatment solution (TL) flows from the upper side toward the lower side in the vertical direction along the substrate surface. Thus, a substrate treating method and the substrate treating apparatus, whereby the substrate can be stably treated, are provided.
Inventors:
MAKINO, Natsuki (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
牧野 夏木 (〒02 東京都品川区東品川２丁目５番８号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
KATO, Masaaki (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
牧野 夏木 (〒02 東京都品川区東品川２丁目５番８号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
KATO, Masaaki (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
Application Number:
JP2011/001025
Publication Date:
September 01, 2011
Filing Date:
February 23, 2011
Export Citation:
Assignee:
SUMITOMO BAKELITE CO., LTD. (5-8 Higashi-Shinagawa 2-chome, Shinagawa-ku Tokyo, 02, 〒1400002, JP)
住友ベークライト株式会社 (〒02 東京都品川区東品川２丁目５番８号 Tokyo, 〒1400002, JP)
MAKINO, Natsuki (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
牧野 夏木 (〒02 東京都品川区東品川２丁目５番８号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
住友ベークライト株式会社 (〒02 東京都品川区東品川２丁目５番８号 Tokyo, 〒1400002, JP)
MAKINO, Natsuki (5-8, Higashi-Shinagawa 2-chome, Shinagawa-k, Tokyo 02, 〒1400002, JP)
牧野 夏木 (〒02 東京都品川区東品川２丁目５番８号 住友ベークライト株式会社内 Tokyo, 〒1400002, JP)
International Classes:
H05K3/18; B08B3/04; B08B3/12; C25D7/00; C25D17/00; H05K3/26
Attorney, Agent or Firm:
HAYAMI, Shinji (Gotanda TG Bldg. 9F, 9-2 Nishi-Gotanda 7-chome, Shinagawa-k, Tokyo 31, 〒1410031, JP)
Claims:
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