SUBSTRATE TREATMENT DEVICE AND VIBRATION DETECTION METHOD

Title:

SUBSTRATE TREATMENT DEVICE AND VIBRATION DETECTION METHOD

Document Type and Number:

WIPO Patent Application WO/2018/150709

Kind Code:

A1

Abstract:

A substrate treatment device (SP) treats a substrate (W). The substrate treatment device (SP) is provided with a spin chuck (5c), a first drive unit (5a), a chamber (3), and a detection unit (SN). The spin chuck (5c) is capable of holding the substrate (W). The first drive unit (5a) drives the spin chuck (5c), and rotates the spin chuck (5c). The chamber (3) houses the spin chuck (5c) and the first drive unit (5a). The detection unit (SN) detects vibration (vb) via the first drive unit (5a), said vibration including vibration (sv) of the spin chuck (5c). The first drive unit (5a) is disposed between the spin chuck (5c) and the detection unit (SN). The detection unit (SN) faces the first drive unit (5a).

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Inventors:

TANIZAWA SHIGEKI (JP)
MATSUMOTO TAKAO (JP)

Application Number:

PCT/JP2017/045144

Publication Date:

August 23, 2018

Filing Date:

December 15, 2017

Export Citation:

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Assignee:

SCREEN HOLDINGS CO LTD (JP)

International Classes:

H01L21/683; H01L21/304

Foreign References:

JP2006237456A	2006-09-07
JP2015070015A	2015-04-13
JP2001330620A	2001-11-30
JP2015005567A	2015-01-08

Attorney, Agent or Firm:

MAEI Hiroyuki (JP)

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