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Title:
SUBSTRATE TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/091413
Kind Code:
A1
Abstract:
Disclosed in the present embodiment is a substrate treatment device in which one surface of an alignment assembly for aligning a substrate and a mask is integrally formed with the body of a vacuum chamber. Therefore, provided is an alignment assembly including a plate integrally formed with a body for forming the external surface of a vacuum chamber, the alignment assembly, in comparison with a conventional assembly, reducing the work time for fine movement and alignment of a substrate and a mask, thereby improving production efficiency.

Inventors:
CHO SAENG HYUN (KR)
AHN SUNG IL (KR)
Application Number:
PCT/KR2019/014458
Publication Date:
May 07, 2020
Filing Date:
October 30, 2019
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
International Classes:
H01L51/56; C23C14/24; H01L21/67; H01L21/68; H01L21/687; H01L51/00
Foreign References:
KR100712953B12007-05-02
KR101310336B12013-09-23
KR101629462B12016-06-13
KR101289050B12013-07-22
US20060196802A12006-09-07
Attorney, Agent or Firm:
NAM & NAM (KR)
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