Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SUBSTRATE WITH THOUGH ELECTRODE AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2012/102252
Kind Code:
A1
Abstract:
This method for producing a substrate with a though electrode comprises: a step wherein a recessed portion (21) or a through hole (21B) is formed in one of a silicon substrate (51) and a glass substrate (54); a step wherein a projected portion (52) is formed on the other substrate; a step wherein the silicon substrate (51) and the glass substrate (54) are combined together so that the projected portion (52) is inserted into the recessed portion (21) or the through hole (21B); and a step wherein the silicon substrate (51) and the glass substrate (54) are bonded with each other.

Inventors:
HOZUMI, Junichi (())
穗積 潤一 (())
TAURA, Takumi (())
田浦 巧 (())
OKUMURA, Shin (())
Application Number:
JP2012/051391
Publication Date:
August 02, 2012
Filing Date:
January 24, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真1006番地 Osaka, 〒5718501, JP)
HOZUMI, Junichi (())
穗積 潤一 (())
TAURA, Takumi (())
田浦 巧 (())
International Classes:
H01L23/02; C03C27/02; G01P15/08; G01P15/125; H01L23/04; H01L23/06; H01L23/14; H01L29/84
Domestic Patent References:
WO2008136316A1
WO2011118786A1
Foreign References:
JP2008518790A
JP2010153691A
JP2007516602A
JP4480939B2
Other References:
See also references of EP 2669940A1
Attorney, Agent or Firm:
ITO, Masakazu et al. (Toranomon Kotohira Tower, 2-8 Toranomon 1-chom, Minato-ku Tokyo 01, 〒1050001, JP)
Download PDF:
Claims: