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Title:
SUBSTRATE WITH TRANSPARENT ELECTRODE AND METHOD FOR MANUFACTURING SUBSTRATE WITH TRANSPARENT ELECTRODE
Document Type and Number:
WIPO Patent Application WO/2010/026899
Kind Code:
A1
Abstract:
Disclosed is a substrate with a transparent electrode that can solve problems associated with conventional substrates with a transparent electrode, namely problems wherein, in thin films of zinc oxide transparent electroconductive oxide, the electrical resistivity is easily increased due to air or moisture making it difficult to use the thin film as a substrate with a transparent electrode and problems wherein, although doping can suppress the increase in the electrical resistivity to some extent, the doping poses problems in terms of the selection of the type and amount of doping agents and an doping-derived increase in initial electrical resistivity. A substrate with a transparent electrode which has stable electrical resistivity under various environments can be manufactured by magnetron sputtering using a target comprising zinc oxide transparent electroconductive oxide and 0.50 to 2.75% by weight of silicon dioxide added thereto.

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Inventors:
KUCHIYAMA Takashi (1-1 Torikai-nishi 5-chome, Settsu-sh, Osaka 72, 〒5660072, JP)
口山　崇 (〒72 大阪府摂津市鳥飼西５丁目１－１　株式会社カネカ内 Osaka, 〒5660072, JP)
Application Number:
JP2009/064863
Publication Date:
March 11, 2010
Filing Date:
August 26, 2009
Export Citation:
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Assignee:
KANEKA CORPORATION (2-4 Nakanoshima 3-chome, Kita-ku Osaka-sh, Osaka 88, 〒5308288, JP)
株式会社カネカ (〒88 大阪府大阪市北区中之島三丁目２番４号 Osaka, 〒5308288, JP)
KUCHIYAMA Takashi (1-1 Torikai-nishi 5-chome, Settsu-sh, Osaka 72, 〒5660072, JP)
International Classes:
H01B13/00; G02F1/1343; G06F3/041; G06F3/045; H01B5/14; H01L31/04
Attorney, Agent or Firm:
FUJITA Takashi et al. (Markbest Building 3F, 10-19 Higashitenma 2-chome, Kita-ku, Osaka-sh, Osaka 44, 〒5300044, JP)
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