Title:
SUCKED MATERIAL DETECTOR, SUCKED MATERIAL DETECTING METHOD USING THE SAME DETECTOR, SHIFT DETECTING METHOD USING THE SAME DETECTOR, AND CLEANING METHOD USING THE SAME DETECTOR
Document Type and Number:
WIPO Patent Application WO/1997/046071
Kind Code:
A1
Abstract:
This detector is provided with a suction transfer arm (12) for vacuum sucking an object material (11) at a nozzle bore and transferring the material in the horizontal and vertical directions. On the rear side of the portion of a stage (13) on which the material (11) to be sucked is placed, an upwardly directed light-emitting sensor (14) is provided. The portion of the stage on which the material (11) to be sucked is placed is provided with a through hole by which the upward rays of light-emitting sensor (14) is not shut off. At an inner part of the nozzle bore of the suction transfer arm (12), a downwardly directed light receiving sensor (15) for receiving the rays of light from the light-emitting sensor (14) is provided.
Inventors:
Furuta, Katsunobu
Application Number:
PCT/JP1997/001810
Publication Date:
December 04, 1997
Filing Date:
May 28, 1997
Export Citation:
Assignee:
ADVANTEST CORPORATION FURUTA, Katsunobu.
International Classes:
G01R31/26; B25J15/06; B65G57/04; B65G59/04; G01V8/10; G01V8/16; H01L21/677; H05K13/02; H05K13/04; H05K13/08; (IPC1-7): H05K13/08