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Patent Searching and Data


Title:
SUCTION CHUCK
Document Type and Number:
WIPO Patent Application WO/2019/130740
Kind Code:
A1
Abstract:
This suction chuck is provided with: a suction chuck stage having a circular suction surface; and a suction pad that is provided on the suction surface. The suction chuck is also provided with, at an outer peripheral portion of the suction surface, an elastic member between the suction surface and the suction pad, and height h, i.e., the distance between an inner peripheral portion of the suction surface and the highest point of the elastic member, is 1 mm or more.

Inventors:
KAMINO Kiyoharu (2-1 Shibaura 1-chom, Minato-ku Tokyo 34, 〒1058634, JP)
Application Number:
JP2018/038527
Publication Date:
July 04, 2019
Filing Date:
October 16, 2018
Export Citation:
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Assignee:
SUMCO CORPORATION (2-1 Shibaura 1-chome, Minato-ku Tokyo, 34, 〒1058634, JP)
International Classes:
H01L21/683; B24B37/30; B24B41/06; H01L21/304
Foreign References:
JP2013078810A2013-05-02
JP2011253841A2011-12-15
Attorney, Agent or Firm:
SUGIMURA Kenji (36F Kasumigaseki Common Gate West, 3-2-1 Kasumigasek, Chiyoda-ku Tokyo 13, 〒1000013, JP)
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