Title:
SUCTION METHOD, SUCTION DEVICE, LASER PROCESSING METHOD, AND LASER PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/146887
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a suction method and suction device with which an object surface, having been installed in an open system, can be depressurized to critical pressure or less and suctioned, as well as a laser processing device and laser processing method using the foregoing. An object (31) installed in an open system and a suction port (2) are spaced apart by a predetermined operating distance (Wd), and in this state, the pressure in the interior of a depressurization chamber (1) communicating with the suction port is set so as to be no greater than a critical pressure at which the speed of a gas sucked in from the suction port reaches a critical state, and the jet speed of the gas in a jet nozzle (3) for ejecting the gas toward the object is set so as to be greater than 0.2 by Mach number, which is a value found by dividing by the speed of sound of the gas ejected from the jet nozzle. The gas is ejected from the jet nozzle and the gas is suctioned from the suction port to form a swirl flow so as to surround the suction port between the object surface and the suction port, whereby the pressure of a center region of the swirl flow from the suction port to the object surface is depressurized to the critical pressure or lower to perform suction.
Inventors:
ASHIHARA MASAAKI (JP)
Application Number:
PCT/JP2015/058685
Publication Date:
October 01, 2015
Filing Date:
March 23, 2015
Export Citation:
Assignee:
FUKUI PREFECTURAL GOVERNMENT (JP)
International Classes:
B08B5/00; B23K26/16
Foreign References:
| JPH0861735A | 1996-03-08 | |||
| JP2001254983A | 2001-09-21 | |||
| JP2007007724A | 2007-01-18 | |||
| JP2001096233A | 2001-04-10 | |||
| JPH1099978A | 1998-04-21 | |||
| GB2428398A | 2007-01-31 | |||
| US3915739A | 1975-10-28 |
Attorney, Agent or Firm:
KAWASAKI YOSHIAKI (JP)
Kawasaki Yoshiaki (JP)
Kawasaki Yoshiaki (JP)
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