Title:
SUCTIONING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/098141
Kind Code:
A1
Abstract:
A suctioning method for using a suction collet to suction a Fabry-Perot interference filter provided with a substrate and a lamination structure part which is provided on the substrate and which includes a main surface facing the opposite side to the substrate, wherein the suctioning method is provided with a first step for disposing the suction collet so as to face the main surface, a second step for bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step for suctioning the Fabry-Perot interference filter by means of the suction collet after the second step.
Inventors:
HIROSE MASAKI (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
KAWAI TOSHIMITSU (JP)
OYAMA HIROKI (JP)
KURAMOTO YUMI (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
KAWAI TOSHIMITSU (JP)
OYAMA HIROKI (JP)
KURAMOTO YUMI (JP)
Application Number:
PCT/JP2018/041726
Publication Date:
May 23, 2019
Filing Date:
November 09, 2018
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01L21/67; G02B5/28
Domestic Patent References:
| WO2015064749A1 | 2015-05-07 |
Foreign References:
| JP2005509897A | 2005-04-14 | |||
| JPH04188840A | 1992-07-07 | |||
| JPH0181633U | 1989-05-31 | |||
| JP2006073839A | 2006-03-16 | |||
| JP2004157292A | 2004-06-03 | |||
| JP2013506154A | 2013-02-21 |
Other References:
See also references of EP 3712930A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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