Title:
SULFUR SALT CONTAINING CIG TARGETS, METHODS OF MAKING AND METHODS OF USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2012/054476
Kind Code:
A3
Abstract:
A method of making a photovoltaic device includes forming a compound semiconductor layer including copper, indium, gallium, selenium and sulfur by reactive sputtering at least one target including copper, indium, gallium and a sulfur compound in an atmosphere including selenium.
Inventors:
SHUFFLEBOTHAM PAUL (US)
JULIANO DANIEL R (US)
TAS ROBERT (US)
MACKIE NEIL M (US)
JULIANO DANIEL R (US)
TAS ROBERT (US)
MACKIE NEIL M (US)
Application Number:
PCT/US2011/056704
Publication Date:
August 02, 2012
Filing Date:
October 18, 2011
Export Citation:
Assignee:
MIASOLE (US)
SHUFFLEBOTHAM PAUL (US)
JULIANO DANIEL R (US)
TAS ROBERT (US)
MACKIE NEIL M (US)
SHUFFLEBOTHAM PAUL (US)
JULIANO DANIEL R (US)
TAS ROBERT (US)
MACKIE NEIL M (US)
International Classes:
H01L31/042; H01L31/18
Foreign References:
| JP3876440B2 | 2007-01-31 | |||
| US20030102023A1 | 2003-06-05 | |||
| US20070116892A1 | 2007-05-24 |
Attorney, Agent or Firm:
RADOMSKY, Leon et al. (PLLC11800 Sunrise Valley Drive, 15th Floo, Reston Virginia, US)
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