Title:
SUPER-ABRASIVE GRAIN WHEEL, WAFER MANUFACTURING METHOD USING SAME, AND WAFER
Document Type and Number:
WIPO Patent Application WO/2011/086715
Kind Code:
A1
Abstract:
Provided is a super-abrasive grain wheel such that grinding fluid can be uniformly dispersed and that stable rotation can be achieved. The super-abrasive grain wheel (1) is equipped with a base metal block (10) which rotates about a rotation shaft, and super-abrasive grain layers (20) which are firmly fixed to the base metal block (10). The base metal block (10) comprises a first surface (201), and a second surface (202) which is located on the opposite side to the first surface (201). A first protrusion (121) which is annular and projects in a direction moving away from the first surface (201) is provided in a portion of the second surface (202), said portion being an area surrounded by the super-abrasive grain layers (20). A reference surface (110) is provided in a portion of the second surface (202), said portion being inward from the first protrusion (121). The height from the reference surface (110) to the first protrusion (121) is denoted by A. A top section (114) having a height of B as measured from the reference surface (110) is provided in a portion of the second surface (202), said portion being an area between the first protrusion (121) and the super-abrasive grain layers (20). The height B is larger than the height A.
Inventors:
ISHIZU, Tomohiro (1816-174 Kotaka-Kuroishi, Kato-sh, Hyogo 21, 〒6790221, JP)
石津 智広 (〒21 兵庫県加東市河高黒石１８１６番地１７４ 株式会社アライドマテリアル内 Hyogo, 〒6790221, JP)
OKANISHI, Yukio (4-16 Kyomachibori 1-chome, Nishi-ku, Osaka-sh, Osaka 03, 〒5500003, JP)
石津 智広 (〒21 兵庫県加東市河高黒石１８１６番地１７４ 株式会社アライドマテリアル内 Hyogo, 〒6790221, JP)
OKANISHI, Yukio (4-16 Kyomachibori 1-chome, Nishi-ku, Osaka-sh, Osaka 03, 〒5500003, JP)
Application Number:
JP2010/059748
Publication Date:
July 21, 2011
Filing Date:
June 09, 2010
Export Citation:
Assignee:
A.L.M.T. CORP. (1-11-11, Shiba Minato-k, Tokyo 14, 〒1050014, JP)
株式会社アライドマテリアル (〒14 東京都港区芝一丁目１１番１１号 Tokyo, 〒1050014, JP)
ISHIZU, Tomohiro (1816-174 Kotaka-Kuroishi, Kato-sh, Hyogo 21, 〒6790221, JP)
石津 智広 (〒21 兵庫県加東市河高黒石１８１６番地１７４ 株式会社アライドマテリアル内 Hyogo, 〒6790221, JP)
株式会社アライドマテリアル (〒14 東京都港区芝一丁目１１番１１号 Tokyo, 〒1050014, JP)
ISHIZU, Tomohiro (1816-174 Kotaka-Kuroishi, Kato-sh, Hyogo 21, 〒6790221, JP)
石津 智広 (〒21 兵庫県加東市河高黒石１８１６番地１７４ 株式会社アライドマテリアル内 Hyogo, 〒6790221, JP)
International Classes:
B24B55/02; B24D7/10
Attorney, Agent or Firm:
FUKAMI, Hisao et al. (Fukami Patent Office, Nakanoshima Central Tower 22nd Floor, 2-7, Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
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