Title:
SUPER-PRECISE MICRO-DIFFERENTIAL PRESSURE MEASURING DEVICE AND SUPER-PRECISE DIFFERENTIAL PRESSURE MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2004/074802
Kind Code:
A1
Abstract:
A super-precise micro-differential pressure measuring device capable of continuously measuring a micro-differential pressure with high accuracy by transmitting micro-differential pressure to an electronic weighing /pressure transducing device without passing any mechanical sliding part, simplifying the structure, and largely lowering production cost. Specifically, the super-precise micro-differential pressure measuring device comprises a device body (1) having a space part therein, a pressure receiving plate (3) disposed in the internal space of the device body (1) and dividing airtight the internal space into a lower space (7) and an upper space (8), the electronic weighing /pressure transducing device (2) disposed in the lower space (7) and having the pressure receiving plate (3) fixedly supported thereon, and a liquid sealing part (R) liquid-sealing the outer peripheral edge part of the pressure receiving plate (3) to hold airtightness between the lower space (7) and the upper space (8). A micro-differential pressure between a pressure (P1) in the upper space (8) and a pressure (P2) in the lower space (7) is measured by the electronic weighing /pressure transducing device (2) through the pressure receiving plate (3).
Inventors:
SEKOGUCHI KOTOHIKO (JP)
Application Number:
PCT/JP2004/001513
Publication Date:
September 02, 2004
Filing Date:
February 12, 2004
Export Citation:
Assignee:
FUJIKIN KK (JP)
SEKOGUCHI KOTOHIKO (JP)
SEKOGUCHI KOTOHIKO (JP)
International Classes:
G01L13/06; G01L19/06; G01L27/00; (IPC1-7): G01L13/06
Foreign References:
| JPS5735743A | 1982-02-26 |
Other References:
See also references of EP 1596177A4
Attorney, Agent or Firm:
Sugimoto, Takeo (1-21 Kitahama 2-chom, Chuo-ku Osaka-shi Osaka 41, JP)
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