RELATED APPLICATIONS

[0001] This application claims priority from U.S. Patent Application Serial No. 15/677756, filed 15 August 2017, which is incorporated herein in its entirety.

GOVERNMENT INTEREST

[0002] The invention was made under Government Contract Number 30059305. Therefore, the U.S. Government has rights to the invention as specified in that contract.

TECHNICAL FIELD

[0003] The present disclosure relates generally to integrated circuits, and more particularly to a superconducting device with a thermally conductive heat sink.

BACKGROUND

[0004] Monolithic Microwave Integrated circuit (MMIC) chips operating at cryogenic temperatures have superconducting circuits that need to be thermally managed by removing the heat from the superconducting circuits down towards the substrate. Heat removal off the top side is inefficient due to superconducting solder bumps. This leads to unacceptably high temperature gradients. However, ground planes made of superconducting mesh material in lower level layers in the MMIC bring the entire layers to a thermal equilibrium. Because of this, portions of devices on the MMIC that need to be maintained at lower temperatures end up becoming exposed to higher temperature components. At the cryogenic conditions, heat load, cooling resources, and temperature are strongly tied to each other. The savings of one unit of power dissipation is magnified by multiple orders of magnitude when lifting from cryogenic temperatures to room temperature.

[0005] A typical superconducting electronic circuit will contain resistors made from a metal with a low electrical conductivity and superconducting elements that are fabricated in or on an insulating material. In typical operation, currents flowing through the resistors will generate heat in the form of hot electrons. The heat will be trapped in the electrons until it can convert to phonons via the electron-phonon coupling. The hot phonons will then travel through the circuit to the package and ultimately to the cryocooler. During their migration to the cryocooler, they heat the entire electronic circuit resulting in an increase in energy to maintain the electronic circuit at a desired operating temperature.

SUMMARY

[0006] In one example, an integrated circuit is provided that comprises a resistor, a first superconducting structure coupled to a first end of the resistor, and a second superconducting structure coupled to a second end of the resistor. A thermally conductive heat sink structure is coupled to the second end of the resistor for removing heat from the electrons prior to generating hot phonons.

[0007] In another example, a monolithic microwave integrated circuit (MMIC) is provided. The MMIC comprises a dielectric structure overlying a substrate, a plurality of superconducting structures residing in a first dielectric layer of the dielectric structure, a plurality of resistors residing in a second dielectric layer of the dielectric structure, and a plurality of superconducting contacts residing in an intermediate layer of the dielectric structure. The intermediate layer resides between the first dielectric layer and the second dielectric layer. A first superconducting contact of the plurality of

superconducting contacts couples a first end of a given resistor to a first

superconducting structure, and a second superconducting contact of the plurality of superconducting contacts couples a second end of the given resistor to a second superconducting structure for each of the plurality of resistors. The MMIC further comprises a thermally conductive heat sink structure coupled to second ends of each of the plurality of resistors to form a common ground and to remove heat from the electrons of the plurality of resistors prior to the hot electrons generating phonons. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] FIG. 1 illustrates cross-sectional view of a portion of an example integrated circuit.

[0009] FIG. 2 illustrates cross-sectional view of a portion of another example integrated circuit.

[0010] FIG. 3 illustrates a plan view of the portion of the integrated circuit of FIG. 2.

[0011] FIG. 4 illustrates a cross-sectional view of an example of a Monolithic Microwave Integrated circuit (MMIC).

DETAILED DESCRIPTION

[0012] The present disclosure describes an integrated circuit (e.g., Monolithic Microwave Integrated circuit (MMIC)) that includes superconducting circuits disposed in a dielectric structure, and a thermally conductive heat sink that provides a thermal path to remove heat from components of the integrated circuit. The highly thermally conductive heat sink can be formed of a normal metal that has a high thermal conductivity, such as copper. The normal metal need not be copper but can be other highly thermally conductive metals that do not become a superconductor under cryogenic temperatures. Additional examples include gold, silver, tungsten,

molybdenum, iridium, and rhodium.

[0013] A normal metal as defined herein refers to a metal that is a very good thermal conductor, such as a highly thermal conductive metal that readily transports and distributes heat via electron conduction to provide a mechanism to remove heat from active circuits. Active circuits can include heat generating circuit components, such as resistors or other components that generate heat as a result of current flowing through the circuit components. The resistors can be formed of a resistive material such as a titanium tungsten alloy or molybdenum. The active circuits can also include superconducting components that form part of the active circuits. Superconducting components include superconductive material, which is a very good electrically conductive material but a poor thermal conductive material. However, the

superconducting components need to be maintained at defined cryogenic temperatures, which requires energy. Heat generated by the heat generating components causes the temperature of the device to increase that includes the heat generating components and the superconducting components, and as a result requires more energy to maintain the device and its associated components at the defined cryogenic temperatures.

[0014] In one example, a control circuit for an active component of a

superconducting device contains a pair of energized superconducting structures (e.g., transmission lines, Josephson junctions, inductors, quantum bits, or a combination thereof such as one or more reciprocal quantum logic devices) with flowing electrical current. The system needs to be kept below the maximum operating temperature, such as 50 millikelvin (imK). One benefit of being below the operating temperature is that the control circuits behave as superconductors. The current flowing through them has no resistance, and therefore no heat is dissipated. To complete the electrical circuit, a resistive element is sometimes placed between the two energized superconducting structures. Since this element needs to have electrical resistive properties for the control circuit to operate properly, the element is not a superconductor. Current flowing through this element dissipates heat. It is this heat that needs to be be thermally managed.

[0015] The highly thermally conductive heat sink removes heat from the electrons of the resistive elements prior to the hot electrons creating phonons to reduce heat in the MMIC. In one example, the normal metal thermal sink is coupled to ends of the resistive elements, and can provide a common ground. The advantages of a common ground are a well-managed heat flow and a concentration of heat paths to a common sink that also operates as a common electrical ground. Alternatively, an electrical ground could be provided by a second common ground made of a superconducting material. A thermally conductive contact can couple the thermally conductive heat sink to a thermally conductive plate disposed on top of the dielectric structure. Alternatively, a thermally conductive contact can directly couple an end of a respective resistor for each of a plurality of resistors and respective thermally conductive contacts to a thermally conductive plate. The normal metal conductive plate provides an augmented heat conduction path, and can be cooled directly. In one example, a through substrate via (TSV) couples the thermally conductive plate to a thermally conductive heat spreader disposed on a bottom of the subtrate. The TSV provides a thermal path through the dielectric structure and the substrate without introducing significant temperature gradients. This heat spreader increases the heat transfer area between the bottom of the chip and a coldhead that provides the cryogenic temperatures to the MMIC. The increased area reduces temperature gradients between the spreader and the coldhead.

[0016] FIG. 1 illustrates cross-sectional view of a portion of an example integrated circuit 10. The portion of the integrated circuit 10 includes a plurality of stacked dielectric layers overlying a substrate 12. The plurality of dielectric layers form a dielectric structure 1 1 . The dielectric structure 1 1 includes a first dielectric layer 14 overlying the substrate 12, a second dielectric layer 16 overlying the first dielectric layer 14, a third dielectric layer 18 overlying the second dielectric layer 16, a fourth dielectric layer 20 overlying the third dielectric layer 18, a fifth dielectric layer 22 overlying the fourth dielectric layer 20, and a sixth dielectric layer 24 overlying the fifth dielectric layer 22. The substrate 12 can be formed of silicon, glass or other substrate material. A plurality of superconducting structures are disposed in the dielectric structure 1 1 .

[0017] A first superconducting structure 26 and a second superconducting structure 28 reside in the first dielectric layer 14. A third superconducting structure 34 and a fourth superconducting structure 36 reside in the third dielectric layer 16. A first superconducting contact 30 connects the first superconducting structure 26 to the fourth superconducting structure 36 through the second dielectric layer 16, and a second superconducting contact 32 connects the second superconducting structure 28 to the fourth superconducting structure 36 through the second dielectric layer 16. A

resistor 42 resides in the fifth dielectric layer 22 and is coupled at a first end to the third superconducting structure 34 by a third superconducting contact 38 and is coupled at a second end to the fourth superconducting structure 36 by a fourth superconducting contact 40. Both the third superconducting contact 38 and the fourth superconducting contact 40 extend through the fourth dielectric layer 20. A second end of the resistor 42 is also coupled to a thermally conductive sink structure 44. The thermally conductive sink structure 44 can act as a ground plane for the resistor 42 and superconducting structures.

[0018] The thermally conductive sink structure 44 is formed of a thermally conductive material, such as a normal metal. A thermally conductive material is a material that is a relatively good thermal conductor, such that it readily transfers heat. A superconductive material is a good electrically conductive material but a poor thermal conductive material. Therefore, the thermally conductive sink structure 44 is not formed of a superconductive material, but a material that is relatively good at conducting heat from the resistor 42 to the thermally conductive sink structure 44. The thermaly conductive sink structure 44 can be cooled by an external source.

[0019] The thermally conductive sink structure 44 can be connected to the chip package and/or the cryocooler via a path made from normal metal with very high conductivity. Hot electrons generated in the resistor 42 can be carried through the normal metal to the cryocooler providing an alternate path for heat flow, for example, to the top or bottom of the integrated circuit. As long as the normal metal has a sufficiently high thermal conductivity, the thermal resistance of this second path will be less than the phonon mediated path and the temperature of the circuit will be reduced.

[0020] In another example as illustrated in FIGS. 2-3, the resistor is extended beyond the electrical connection to the superconducting circuit. A via is then etched through the insulator from the resistor to the surface of the circuit and filled with a high thermally conductive metal such as gold or copper. The top and bottom surfaces of the chip are covered in high thermally conductive normal metal and a through substrate via (TSV) contact etched through the chip and filled with high thermally conductive normal metal to couple the top and bottom high thermally conductive metal layers. The bottom of the chip can be held in contact with a normal metal package.

[0021] FIG. 2 illustrates a cross-sectional view of portion of an example integrated circuit 50 with the TSV contact discussed above. FIG. 3 illustrates a plan view of the portion of the integrated circuit 50 of FIG. 2. The portion of the integrated circuit 50 includes a plurality of stacked dielectric layers overlying a substrate 52. The plurality of dielectric layers form a dielectric structure 51 . The dielectric structure 51 includes a first dielectric layer 54 overlying the substrate 52, a second dielectric layer 56 overlying the first dielectric layer 54, a third dielectric layer 58 overlying the second dielectric layer 56, and a fourth dielectric layer 60 overlying the third dielectric layer 58 The substrate 52 can be formed of silicon, glass or other substrate material.

[0022] A plurality of superconducting structures 62, 64, 80, 82 and 90 are disposed in the first dielectric layer 54, and a plurality of resistors 70, 84 and 92 are disposed in the third dielectric layer 58. Ends of each resistor of the plurality of resistors 70, 84 and 92 are coupled to respective superconducting structures by superconducting contacts 66, 68, 83, 85, 91 and 93 that extend through the second dielectric layer 56 to form a plurality of active circuits. A resistor and a pair of superconducting structures can form an active circuit. A ground end of each resistor extends beyond its contact point to its respective superconducting structure.

Respective thermally conductive contacts 72, 86 and 94 couple each ground end of each respective resistor, for each of the plurality of resistors 70, 84 and 92, to a thermally conductive plate 74 that resides on a top surface of the integrated circuit 50. The thermally conductive plate 74 provides an augmented heat conduction path, and can be cooled directly. [0023] A through substrate via (TSV) 76 couples the thermally conductive plate 74 to a thermally conductive heat spreader 78 disposed on a bottom of the subtrate 50. The TSV 76 provides a thermal path through the dielectric structure 51 and the substrate 52 without introducing significant temperature gradients. This thermally conductive heat spreader 78 increases the heat transfer area between the bottom of the chip and a coldhead that provides the cryogenic temperatures to the IC. The increased area reduces temperature gradients between the thermally conductive heat spreader 78 and the coldhead.

[0024] As illustrated in FIG. 4, a MMIC 100 includes an integrated circuit 102 that includes active devices with superconducting structures 106 and resistors 108 connected to one another by surconducting contacts 1 10. A plurality of thermally conductive plates 1 12 reside on the top surface of the integrated circuit 102 and connect to resistors 108 through respective thermally conductive contacts 1 14 and to the backside of the integrated circuit 102 through respective thermally conductive through substrate vias (TSVs) (1 16). The integrated circuit 102 can be disposed in a package 104 such as a carrier, printed circuit board or interposer. The backside of the substrate of the integrated circuit 102 is coated with a normal metal to form a thermally conductive spreader 122 that connects to the package 104. This provides a highly conductive thermal path from the resistors 108 to the package 104 to allow heat to escape. In this instance, electrical contact is made to the superconducting

structures 106 through a wirebond 1 18 to a superconducting contact pad 120.

Alternatively, the superconducting contact pad 120 can be connected to a printed circuit board via a pressure contact or an interposer or soldered directly to a socket.

[0025] What have been described above are examples of the invention. It is, of course, not possible to describe every conceivable combination of components or methodologies for purposes of describing the invention, but one of ordinary skill in the art will recognize that many further combinations and permutations of the invention are possible. Accordingly, the invention is intended to embrace all such alterations, modifications, and variations that fall within the scope of this application, including the appended claims.