Title:
SUPERCONDUCTION X-RAY DETECTOR AND X-RAY ANALYZER USING SAME
Document Type and Number:
WIPO Patent Application WO/2006/078024
Kind Code:
A1
Abstract:
A superconduction X-ray detector having a sensitivity not lowered by the self magnetic field and enabling measurement with high-energy resolution. The superconduction X-ray detector comprises a temperature sensor (6) adapted for detecting a temperature variation due to heat generated when X-rays are absorbed and composed of a superconductive multilayer thin film and a heat link (3) for controlling the heat flow rate at which the generated heart escapes to a support substrate (1). The superconduction X-ray detector has a structure in which a superconductor layer (4) is formed on the heat link (3), and an insulator (2) is interposed between the superconductor layer (4) and the temperature sensor (6). The superconductor layer (4) and the temperature sensor (6) are interconnected through a superconductive wire (7). The superconduction transition temperature of the material of the superconductor layer (4) and the superconductive wire (7) is higher than that of the temperature sensor (6).
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Inventors:
TANAKA KEIICHI (JP)
ODAWARA AKIKAZU (JP)
NAKAYAMA SATOSHI (JP)
ODAWARA AKIKAZU (JP)
NAKAYAMA SATOSHI (JP)
Application Number:
PCT/JP2006/300987
Publication Date:
July 27, 2006
Filing Date:
January 24, 2006
Export Citation:
Assignee:
SII NANOTECHNOLOGY INC (JP)
TANAKA KEIICHI (JP)
ODAWARA AKIKAZU (JP)
NAKAYAMA SATOSHI (JP)
TANAKA KEIICHI (JP)
ODAWARA AKIKAZU (JP)
NAKAYAMA SATOSHI (JP)
International Classes:
G01T1/26; G01N23/22; H01L39/22
Foreign References:
| JP2004226147A | 2004-08-12 | |||
| JP2000284054A | 2000-10-13 |
Other References:
TANAKA K. ET AL.: "Transition Edge X-ray Sensor Using Anodic Bonding Wafer", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN, vol. 122, no. 11, 2002, pages 517 - 522, XP003000030
Attorney, Agent or Firm:
Matsushita, Yoshiharu (11-2 Hiroo 1-chom, Shibuya-ku Tokyo, JP)
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