Title:
SUPERHYDROPHOBIC MOLD, MANUFACTURING METHOD THEREOF, SUPERHYDROPHOBIC MATERIAL USING SUPERHYDROPHOBIC MOLD, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2017/048071
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a superhydrophobic mold, a superhydrophobic material using a superhydrophobic mold, and a method for manufacturing the same, the method comprising the steps of: bonding a photoresist to a metal surface for a mold; exposing the photoresist to light through lithography to form a photosensitive micropattern; forming a first anodized layer on the photosensitive micropattern through anodic oxidation; etching and removing the first anodization layer to form an anodized micropattern including a nanoseed, which is recessed deeper than the photosensitive micropattern; forming a second anodization layer including an anodized nanopattern on the anodized micropattern including a nanoseed through anodic oxidation; and etching the anodized nanopattern formed of nanopores to adjust the diameter and dent depth of the nanopores. As a result, the etching process and the anodic oxidation process are not performed in order to obtain an anodized micropattern, so that the process can be simplified. Thus, the manufacturing cost and the manufacturing time can be reduced. Also, the anodic oxidation maintains a bonding force between the photoresist and the metal, and the micropattern depth can be increased by controlling the anodization time.
Inventors:
JEONG DAE YEONG (KR)
BALASANKAR ATHINARAYANAN (IN)
BALASANKAR ATHINARAYANAN (IN)
Application Number:
PCT/KR2016/010367
Publication Date:
March 23, 2017
Filing Date:
September 13, 2016
Export Citation:
Assignee:
KERI KOREA ELECTROTECHNOLOGY RES INST (KR)
International Classes:
B29C33/38; B24B19/20; C23F1/10; C25D11/02; C25F3/00; C25F3/16; C25F3/20; G03F7/00
Foreign References:
| KR20150078976A | 2015-07-08 | |||
| KR20090004180A | 2009-01-12 | |||
| KR20100026101A | 2010-03-10 | |||
| KR20130011444A | 2013-01-30 | |||
| KR20000023742A | 2000-04-25 |
Attorney, Agent or Firm:
PUKYUNG INTERNATIONAL PATENT AND LAW FIRM (KR)
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