Title:
SUPPLY APPARATUS, PROCESSING SYSTEM, AND PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/065713
Kind Code:
A1
Abstract:
This supply apparatus is provided with: a supply source including a supply port for supplying powder granular materials; a holding member spaced downward from the supply port and including a holding surface for holding the powder granular materials supplied from the supply port; and a first driving device 1 for moving the holding surface, wherein the holding surface is moved by the first driving device 1, and a portion of the powder granular materials held at the angle of repose on the holding surface are dropped from the holding surface.
Inventors:
UENO KAZUKI (JP)
Application Number:
PCT/JP2018/035640
Publication Date:
April 04, 2019
Filing Date:
September 26, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B65G27/04; B22F3/105; B22F3/16; B23K26/21; B23K26/342; B29C31/02; B29C64/153; B29C64/329; B33Y30/00; B65G65/40
Domestic Patent References:
| WO2017061339A1 | 2017-04-13 |
Foreign References:
| JP2011219157A | 2011-11-04 | |||
| JP5310031B2 | 2013-10-09 | |||
| JPH01103632U | 1989-07-13 | |||
| JP2003237886A | 2003-08-27 |
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (JP)
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