Title:
SUPPORT DEVICE AND DRYING DEVICE INCLUDING THE SAME
Document Type and Number:
WIPO Patent Application WO/2011/077960
Kind Code:
A1
Abstract:
Provided is a drying device for conveying a mother board inwardly/outwardly through a gate valve. The drying device can maintain a state in which the mother board is placed in surface contact with a stage. The drying device comprises: a stage (11a) provided with a placement surface (111) on which a mother board to be dried can be placed in a state of surface contact, the stage (11a) being able to eject gas through the placement surface (111); a gas supply source (13) from which gas to be ejected through the placement surface (111) is supplied to the stage (11a); and a conveyance unit (12) which is provided at two opposite sides of the placement surface (111) of the stage (11a), and is able to convey the mother board along the surface of the stage (11a) while supporting two opposite sides of the mother board and also able to move the mother board up from or down to the placement surface (111) of the stage (11a).
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Inventors:
SAITOH, Takao (())
Application Number:
JP2010/072098
Publication Date:
June 30, 2011
Filing Date:
December 09, 2010
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
H01L21/027; F26B5/04; F26B15/00; H01L21/683
Attorney, Agent or Firm:
UENO, Noboru (KS Iseya Building 8th Floor, 21-23 Sakae 3-chome, Naka-ku, Nagoya-sh, Aichi 08, 〒4600008, JP)
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