Title:
SUPPORT FRAME FOR PELLICLE
Document Type and Number:
WIPO Patent Application WO/2016/113981
Kind Code:
A1
Abstract:
A support frame (1) for a pellicle (P), in which a pellicle film (2) is affixed to the front surface (10a) of an aluminum-alloy frame body (10), and a transparent substrate (M) is affixed to the rear surface (10b) of the frame body (10). A recessed groove (20) is formed in the rear surface (10b) of the frame body (10), the recessed groove extending in the peripheral direction of the frame body (10), and a ventilation hole (30) is formed from the outer peripheral surface (10c) of the frame body (10) to the inner surface of the recessed groove (20). With this configuration, deformation of the support frame (1) can be suppressed when the support frame (1) is removed from the transparent substrate (M).
Inventors:
KIYOMI HAYATO (JP)
Application Number:
PCT/JP2015/080518
Publication Date:
July 21, 2016
Filing Date:
October 29, 2015
Export Citation:
Assignee:
NIPPON LIGHT METAL CO (JP)
International Classes:
G03F1/64; H01L21/027
Domestic Patent References:
| WO2008105531A1 | 2008-09-04 | |||
| WO2015182483A1 | 2015-12-03 |
Foreign References:
| JPH052264A | 1993-01-08 | |||
| JP2006215487A | 2006-08-17 | |||
| JP2005338722A | 2005-12-08 | |||
| JP2011007934A | 2011-01-13 | |||
| JP2013097308A | 2013-05-20 | |||
| JP2004240221A | 2004-08-26 | |||
| JP2002182373A | 2002-06-26 | |||
| JPH09206723A | 1997-08-12 | |||
| JP2002131892A | 2002-05-09 | |||
| JP2010102357A | 2010-05-06 | |||
| JP2013222143A | 2013-10-28 | |||
| JP5619436B2 | 2014-11-05 |
Other References:
See also references of EP 3246753A4
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P. C. (JP)
Patent business corporation Isono international patent trademark office (JP)
Patent business corporation Isono international patent trademark office (JP)
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