Title:
SUPPORT SHEET AND COMPOSITE SHEET FOR PROTECTIVE FILM FORMATION
Document Type and Number:
WIPO Patent Application WO/2019/186992
Kind Code:
A1
Abstract:
This support sheet is provided with a base material and an adhesive layer on the base material; and the adhesive layer-side surface of the base material is a recessed and projected surface. If test pieces are cut out of this support sheet at five different positions and cross-sections of the adhesive layers of these five test pieces are examined, the average (R value) of (total of straight-line distances between adjacent significant vertices)/(straight-line distance in direction horizontal to adhesive layers) ratios is 1.5 or more but less than 5.0. A composite sheet for protective film formation according to the present invention is provided with a film for protective film formation on the adhesive layer of this support sheet.
Inventors:
SAIKI NAOYA (JP)
FURUNO KENTA (JP)
FURUNO KENTA (JP)
Application Number:
PCT/JP2018/013569
Publication Date:
October 03, 2019
Filing Date:
March 30, 2018
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/301; H01L21/56; H01L23/00
Foreign References:
| JP6298226B1 | 2018-03-20 | |||
| JP2016188344A | 2016-11-04 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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