Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SUPPORT SHEET AND COMPOSITE SHEET FOR PROTECTIVE FILM FORMATION
Document Type and Number:
WIPO Patent Application WO/2019/186992
Kind Code:
A1
Abstract:
This support sheet is provided with a base material and an adhesive layer on the base material; and the adhesive layer-side surface of the base material is a recessed and projected surface. If test pieces are cut out of this support sheet at five different positions and cross-sections of the adhesive layers of these five test pieces are examined, the average (R value) of (total of straight-line distances between adjacent significant vertices)/(straight-line distance in direction horizontal to adhesive layers) ratios is 1.5 or more but less than 5.0. A composite sheet for protective film formation according to the present invention is provided with a film for protective film formation on the adhesive layer of this support sheet.

Inventors:
SAIKI Naoya (23-23 Honcho, Itabashi-k, Tokyo 01, 〒1730001, JP)
FURUNO Kenta (23-23 Honcho, Itabashi-k, Tokyo 01, 〒1730001, JP)
Application Number:
JP2018/013569
Publication Date:
October 03, 2019
Filing Date:
March 30, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
LINTEC CORPORATION (23-23, Honcho Itabashi-k, Tokyo 01, 〒1730001, JP)
International Classes:
H01L21/301; H01L21/56; H01L23/00
Foreign References:
JP6298226B12018-03-20
JP2016188344A2016-11-04
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
Download PDF: