Title:
SUPPORT SHEET AND COMPOSITE SHEET FOR PROTECTIVE FILM FORMATION
Document Type and Number:
WIPO Patent Application WO/2019/187014
Kind Code:
A1
Abstract:
This support sheet is provided with a base material and an adhesive layer on the base material; and the adhesive layer-side surface of the base material is a recessed and projected surface. If test pieces having a size of 3 mm × 3 mm are cut out of this support sheet at five different positions and the minimum values and the maximum values of the respective thicknesses of the adhesive layers of these five test pieces are determined, the average of the minimum values is 1.5 μm or more and the average of the maximum values is 9 μm or less. A composite sheet for protective film formation according to the present invention is provided with a film for protective film formation on the adhesive layer of this support sheet.
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Inventors:
SAIKI NAOYA (JP)
FURUNO KENTA (JP)
FURUNO KENTA (JP)
Application Number:
PCT/JP2018/013636
Publication Date:
October 03, 2019
Filing Date:
March 30, 2018
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/301; H01L23/00
Domestic Patent References:
| WO2017163971A1 | 2017-09-28 |
Foreign References:
| JP6298226B1 | 2018-03-20 | |||
| JP5432853B2 | 2014-03-05 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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