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Title:
SUPPORT STRUCTURE FOR ULTRASONIC RESONATOR, AND ULTRASONIC VIBRATING MACHINING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/039720
Kind Code:
A1
Abstract:
A support structure 10 for an ultrasonic resonator supports an ultrasonic resonator 16, in which first and second boosters 14, 15 are coaxially secured at the respective axial sides of an ultrasonic horn 13 to which a machining tool 12 is attached, the ultrasonic resonator 16 being supported at both ends so as to be capable of rotating relative to a holder 17. The holder 17 has a roller bearing mechanism 18 that rotatably supports the first booster 14 side of the ultrasonic resonator 16, and a gas bearing mechanism 19 that rotatably supports the second booster 15 side of the ultrasonic resonator 16.

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Inventors:
YOTSUMOTO KEIICHI (JP)
MORI NOBUHIRO (JP)
KUBO NAOKI (JP)
MATSUYAMA HIRONOBU (JP)
Application Number:
PCT/JP2020/031848
Publication Date:
March 04, 2021
Filing Date:
August 24, 2020
Export Citation:
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Assignee:
TAKADA CORP (JP)
International Classes:
B06B1/02; B28D1/24; H01L21/301
Foreign References:
JP2018126967A2018-08-16
JP2014108471A2014-06-12
JP2004330228A2004-11-25
JP2004122033A2004-04-22
JP2000093894A2000-04-04
JPH1015491A1998-01-20
Attorney, Agent or Firm:
NAKAMAE Fujio (JP)
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