Title:
SUPPORT STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2019/045537
Kind Code:
A1
Abstract:
One embodiment of a support structure can comprise: a pin insertion member having a hollow portion, which is formed in the longitudinal direction and into which a substrate support pin is inserted; a plurality of support members provided in the circumferential direction at the upper and lower parts of the pin insertion member, and making rolling contact with the substrate support pin so as to support the longitudinal movement of the pin insertion member of the substrate support pin; and a coupling member, which is coupled to the outer peripheral surface of the pin insertion member, encompasses the plurality of support members so as to press the support members in the diametrical direction of the pin insertion member, and couples the plurality of support members to the pin insertion member.
Inventors:
WOO RAM (KR)
KIM KI BUM (KR)
KIM HEE JEONG (KR)
BAE JONG TAE (KR)
LEE GIL JE (KR)
HA YUN GYU (KR)
KIM KI BUM (KR)
KIM HEE JEONG (KR)
BAE JONG TAE (KR)
LEE GIL JE (KR)
HA YUN GYU (KR)
Application Number:
PCT/KR2018/010196
Publication Date:
March 07, 2019
Filing Date:
September 03, 2018
Export Citation:
Assignee:
JUSUNG ENG CO LTD (KR)
International Classes:
H01L21/687; H01L21/683
Foreign References:
| KR101108389B1 | 2012-01-30 | |||
| KR101332294B1 | 2013-11-22 | |||
| US4778041A | 1988-10-18 | |||
| KR20150125378A | 2015-11-09 | |||
| KR101296966B1 | 2013-08-14 |
Attorney, Agent or Firm:
LEE, Seung Chan (KR)
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