Title:
SUPPORT SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/221379
Kind Code:
A1
Abstract:
The support substrate according to the present disclosure is a plate-shaped ceramic body having a first surface and a second surface that is located on the reverse side of the first surface. The arithmetic surface roughness Ra of the first surface, as obtained from a roughness curve, is no greater than 0.5 μm and the skewness Rsk, obtained from the roughness curve, is negative.
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Inventors:
HIGASHI KOUJI (JP)
Application Number:
PCT/JP2018/020033
Publication Date:
December 06, 2018
Filing Date:
May 24, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/56
Domestic Patent References:
WO2013008651A1 | 2013-01-17 |
Foreign References:
JP2008180685A | 2008-08-07 | |||
JP2010076948A | 2010-04-08 | |||
JP2016004915A | 2016-01-12 | |||
US20060183269A1 | 2006-08-17 |
Other References:
See also references of EP 3633714A4
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