SUPPORT UNIT FOR SUPPORTING A SUBSTRATE

Title:

SUPPORT UNIT FOR SUPPORTING A SUBSTRATE

Document Type and Number:

WIPO Patent Application WO/2012/141459

Kind Code:

A2

Abstract:

Disclosed is a support unit for supporting a substrate, which prevents the substrate from drooping or being deformed during the treatment of the substrate. The support unit for supporting a substrate according to the present invention prevents the substrate from being warped or deformed due to the weight of the substrate as the entire surface of the substrate is uniformly supported by a plurality of support fins during the treatment of the substrate. Accordingly, the reliability of a flat panel display may be improved.

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Inventors:

KANG HO YOUNG (KR)
CHO BYUNG HO (KR)
PARK JU YOUNG (KR)
KIM CHEOL HO (KR)

Application Number:

PCT/KR2012/002668

Publication Date:

October 18, 2012

Filing Date:

April 09, 2012

Export Citation:

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Assignee:

TERA SEMICON CORP (KR)
KANG HO YOUNG (KR)
CHO BYUNG HO (KR)
PARK JU YOUNG (KR)
KIM CHEOL HO (KR)

International Classes:

H01L21/683; G02F1/13; H01L21/324; H01L21/673

Foreign References:

JP2003232742A	2003-08-22
JP2004107006A	2004-04-08
KR20100064504A	2010-06-15
KR20100008722A	2010-01-26

Attorney, Agent or Firm:

KIM, HAN (KR)
김한 (KR)

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