Title:
SUPPORTING AIR PLATE AND GAS FLOW RESISTOR
Document Type and Number:
WIPO Patent Application WO/2014/181715
Kind Code:
A1
Abstract:
Provided is a technology that eases stress on a subject resulting from gas flow. This supporting air plate has a supporting surface, a compressed gas layer is formed between the supporting surface and a supported subject, and the supported subject is supported in the state of not contacting the supporting surface. The supporting air plate has: a gas flow resistor having a plurality of discharge openings that throttle and discharge a supplied gas flow; a first perforated plate-shaped section having a plurality of first gas supply holes to which the plurality of gas flow resistors are mounted; a second perforated plate-shaped section that is adjacent to the first perforated plate-shaped section at the support surface side and that has second gas supply holes that, at positions corresponding to the first gas supply holes, overlap a portion of the first gas supply holes and interconnect with the first gas supply holes, discharging a gas flow towards the compressed gas layer; and a gas flow opposing surface that opposes the discharge openings of the gas flow resistors that throttle and discharge the gas flow of the gas flow resistors, and that is positioned at the boundary section of the first perforated plate-shaped section and the second perforated plate-shaped section that cause the collision and diffusion of the gas flow discharged from the discharge opening of the gas flow resistors.
Inventors:
TSUNODA KOUICHI (JP)
YASUDA TAKAHIRO (JP)
ITO AKIHIKO (JP)
OZAWA HIDEO (JP)
YASUDA TAKAHIRO (JP)
ITO AKIHIKO (JP)
OZAWA HIDEO (JP)
Application Number:
PCT/JP2014/061730
Publication Date:
November 13, 2014
Filing Date:
April 25, 2014
Export Citation:
Assignee:
OILES INDUSTRY CO LTD (JP)
International Classes:
B65G49/06; B65G51/03; F16C32/06; H01L21/67; H01L21/677
Domestic Patent References:
| WO2012096033A1 | 2012-07-19 | |||
| WO2009119377A1 | 2009-10-01 |
Foreign References:
| JP3116923U | 2005-12-22 | |||
| JPS63225026A | 1988-09-20 | |||
| JPH08503680A | 1996-04-23 | |||
| JP2006111391A | 2006-04-27 | |||
| JP2011235999A | 2011-11-24 | |||
| JP2012176822A | 2012-09-13 | |||
| JP2004335736A | 2004-11-25 | |||
| JP2006008350A | 2006-01-12 | |||
| JP2007027495A | 2007-02-01 | |||
| JP2006347719A | 2006-12-28 | |||
| JP2006019396A | 2006-01-19 | |||
| JP2004262608A | 2004-09-24 |
Attorney, Agent or Firm:
WILLFORT INTERNATIONAL PATENT FIRM (JP)
Patent business corporation Wil photograph international patent firm (JP)
Patent business corporation Wil photograph international patent firm (JP)
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