Title:
SUPPORTING AIR PLATE AND GAS FLOW RESISTOR THEREFOR
Document Type and Number:
WIPO Patent Application WO/2015/019864
Kind Code:
A1
Abstract:
Provided is a technology that eases stress imparted to an object by a gas flow. This supporting air plate has a support surface, forms a compressed gas layer between the support surface and a supported object, and supports the supported object in a state in which said object does not touch the support surface. The supporting air plate has: gas flow resistors that emit a supplied gas flow after applying a prescribed channel resistance thereto; a first perforated plate-shaped section having a plurality of first gas supply holes to which a plurality of gas flow resistors are detachably mounted; a second perforated plate-shaped section that is adjacent to the support surface side of the first perforated plate-shaped section and has, at positions corresponding to the first gas supply holes, second gas supply holes which overlap a portion of the first gas supply holes, communicate with the first gas supply holes, and discharge the gas flow towards the compressed gas layer; and a gas flow opposing surface that is located at the boundary between the first perforated plate-shaped section and the second perforated plate-shaped section, and changes the direction of the gas flow emitted by the gas flow resistors and guides the gas flow in a direction that is different from the direction of the gas flow in the second gas supply holes.
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Inventors:
TSUNODA KOUICHI (JP)
YASUDA TAKAHIRO (JP)
ITO AKIHIKO (JP)
OZAWA HIDEO (JP)
YASUDA TAKAHIRO (JP)
ITO AKIHIKO (JP)
OZAWA HIDEO (JP)
Application Number:
PCT/JP2014/069651
Publication Date:
February 12, 2015
Filing Date:
July 25, 2014
Export Citation:
Assignee:
OILES INDUSTRY CO LTD (JP)
International Classes:
B65G49/06; B65G51/03; H01L21/677
Domestic Patent References:
| WO2012096033A1 | 2012-07-19 | |||
| WO2009119377A1 | 2009-10-01 |
Foreign References:
| JPS63225026A | 1988-09-20 | |||
| JP2011235999A | 2011-11-24 | |||
| JP2012176822A | 2012-09-13 | |||
| JP3116923U | 2005-12-22 | |||
| JP2006111391A | 2006-04-27 | |||
| JP2004335736A | 2004-11-25 | |||
| JP2006347719A | 2006-12-28 | |||
| JP2004262608A | 2004-09-24 |
Attorney, Agent or Firm:
WILLFORT INTERNATIONAL PATENT FIRM (JP)
Patent business corporation Wil photograph international patent firm (JP)
Patent business corporation Wil photograph international patent firm (JP)
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