Title:
SUPPORTING PAD
Document Type and Number:
WIPO Patent Application WO/2011/027412
Kind Code:
A1
Abstract:
A supporting pad is provided which has a supporting face with heightened flatness precision and can improve the in-plane evenness of an object to be polished. The supporting pad (10) includes a urethane sheet (2). The urethane sheet (2) has been formed by the wet solidification method and has a supporting face (Sh) for supporting an object to be polished. The urethane sheet (2) has a skin layer (2a) of a microporous structure, and has many cells (3) formed on the inner side of the skin layer (2a) and having such a size that the cells (3) extend over almost the whole thickness of the urethane sheet. In the urethane sheet (2), the bottoms of the cells (3) are located in the range of from the back side (Sr) to a depth of 0.1t therefrom, provided that t is the thickness of the urethane sheet (2). In a lower layer part (Pr) sandwiched between the section which is located 0.1t inward from the back side (Sr) and is parallel to the back side (Sr) and the section which is located 0.4t inward from the back side (Sr) and is parallel to the back side (Sr), the urethane sheet has a porosity, concerning the cells (3), regulated to 75-95%. In polishing, the urethane sheet (2) shows an increased compressive deformation in the lower layer part (Pr).
Inventors:
KAWAMURA, Yoshihide (1-18-12 Ningyo-cho,Nihombashi,Chuo-k, Tokyo 13, 〒1030013, JP)
川村佳秀 (〒13 東京都中央区日本橋人形町１－１８－１２富士紡ホールディングス株式会社内 Tokyo, 〒1030013, JP)
IWAO, Tomohiro (272, Ohshinden, Saijyo-cit, Ehime 42, 〒7991342, JP)
川村佳秀 (〒13 東京都中央区日本橋人形町１－１８－１２富士紡ホールディングス株式会社内 Tokyo, 〒1030013, JP)
IWAO, Tomohiro (272, Ohshinden, Saijyo-cit, Ehime 42, 〒7991342, JP)
Application Number:
JP2009/004792
Publication Date:
March 10, 2011
Filing Date:
September 24, 2009
Export Citation:
Assignee:
FUJIBO HOLDINGS INC. (1-18-12, Ningyo-cho Nihombashi, Chuo-k, Tokyo 13, 〒1030013, JP)
富士紡ホールディングス株式会社 (〒13 東京都中央区日本橋人形町１丁目１８番１２号 Tokyo, 〒1030013, JP)
KAWAMURA, Yoshihide (1-18-12 Ningyo-cho,Nihombashi,Chuo-k, Tokyo 13, 〒1030013, JP)
川村佳秀 (〒13 東京都中央区日本橋人形町１－１８－１２富士紡ホールディングス株式会社内 Tokyo, 〒1030013, JP)
富士紡ホールディングス株式会社 (〒13 東京都中央区日本橋人形町１丁目１８番１２号 Tokyo, 〒1030013, JP)
KAWAMURA, Yoshihide (1-18-12 Ningyo-cho,Nihombashi,Chuo-k, Tokyo 13, 〒1030013, JP)
川村佳秀 (〒13 東京都中央区日本橋人形町１－１８－１２富士紡ホールディングス株式会社内 Tokyo, 〒1030013, JP)
International Classes:
B24B37/04; H01L21/304
Attorney, Agent or Firm:
IGARASHI, Toshiaki (2nd Fl, Morishita Bldg. 1-8-13, Toranomon, Minato-k, Tokyo 01, 〒1050001, JP)