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Title:
SUPPORTING UNIT, AND MOVING TABLE DEVICE AND LINEAR-MOTION GUIDING DEVICE USING THE SUPPORTING UNIT
Document Type and Number:
WIPO Patent Application WO/2005/001844
Kind Code:
A1
Abstract:
A supporting unit in a moving table device, capable of being easily connected between a base and a table. A supporting unit (U&agr ) has a pair of planar bearing plates (31a, 31b). Inside the planar bearing plates (31a, 31b) are arranged spherical bearing plates (34a, 34b), respectively. Further, a spherical shaft (35) is provided and held between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates (31a, 31b) and each of the spherical bearing plates (34a, 34b), and a spherical bearing is formed between each of the spherical bearing plates (34a, 34b) and the spherical shaft (35), providing the supporting unit (U&agr ) with a certain degree of freedom in five-axis directions. Because the freedom is high, the supporting unit (U&agr ) can be easily connected between a base and a table.

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Inventors:
Umetsu, Shigehiro (4-3146-7, Hachiman-para Yonezawa-sh, Yamagata 28, 99211, JP)
Shimoyama, Tatsuro c/o CKD CORPORATION (250 Ouji 2-chome, Komaki-sh, Aichi 51, 48585, JP)
Uchida, Koji c/o CKD CORPORATION (250 Ouji 2-chome, Komaki-sh, Aichi 51, 48585, JP)
Application Number:
PCT/JP2004/009401
Publication Date:
January 06, 2005
Filing Date:
June 25, 2004
Export Citation:
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Assignee:
CKD CORPORATION (250 Ouji 2-chome, Komaki-shi Aichi, 51, 48585, JP)
TOHOKU PIONEER CORPORATION (1105, Aza Nikko Oaza Kunomoto, Tendo-sh, Yamagata 85, 99485, JP)
Umetsu, Shigehiro (4-3146-7, Hachiman-para Yonezawa-sh, Yamagata 28, 99211, JP)
Shimoyama, Tatsuro c/o CKD CORPORATION (250 Ouji 2-chome, Komaki-sh, Aichi 51, 48585, JP)
Uchida, Koji c/o CKD CORPORATION (250 Ouji 2-chome, Komaki-sh, Aichi 51, 48585, JP)
International Classes:
B23Q1/38; B23Q1/54; F16C29/02; F16C31/02; F16C32/06; G03F7/20; G12B5/00; H01L21/68; H01L21/683; (IPC1-7): G12B5/00; F16C11/06
Attorney, Agent or Firm:
Yamada, Tsuyoshi (Daiichi Hasegawa Bldg. 6F, 13-24 Meieki 3-chome, Nakamura-ku, Nagoya-sh, Aichi ., 450-0002, JP)
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