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Title:
SUPSUPPLY DEVICE, PROCESSING SYSTEM, AND PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/188741
Kind Code:
A1
Abstract:
A supply device comprising a transport member which transports a powder by means of rotation and a drive device which rotates the transport member, wherein the rotation speed of the transport member is changed between complete rotations of the transport member.

Inventors:
UENO KAZUKI (JP)
SHIMIZU FUMIKA (JP)
Application Number:
PCT/JP2019/011447
Publication Date:
September 24, 2020
Filing Date:
March 19, 2019
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
B65G65/46; B23K26/70; B65G33/08; B65G33/26
Domestic Patent References:
WO2017061339A12017-04-13
Foreign References:
JP2005200173A2005-07-28
JP3350328B22002-11-25
JPH0826452A1996-01-30
JPH0645213Y21994-11-16
JPS619860Y21986-03-29
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
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