Title:
SURFACE ACOUSTIC WAVE COMPONENT
Document Type and Number:
WIPO Patent Application WO2002080359
Kind Code:
A3
Abstract:
The aim of the invention is to configure surface acoustic wave components comprising a ferroelectric layer on a substrate and interdigital transducers above and/or below the layer in such a way that said components have an increased coupling factor in the ferroelectric layer in relation to prior art. To achieve this, the ferroelectric layer has a thickness of between 0.25 and 0.35 times the wavelength of the acoustic wave transported in the component, a remanent polarisation situated on the layer plane and a preferential orientation that is perpendicular to the wave propagation. The ferroelectric layer can consist of lead zirconate titanate, barium titanate, lead titanate, lead-zinc niobate, potassium niobate, lithium niobate or lithium tantalate, or of mixtures of these materials. The invention can be advantageously used for SAW components and enables excellent component characteristics to be obtained and components of this type to be integrated into silicon.
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Inventors:
WEIHNACHT MANFRED (DE)
SCHOENECKER ANDREAS (DE)
SCHOENECKER ANDREAS (DE)
Application Number:
PCT/DE2002/001162
Publication Date:
November 28, 2002
Filing Date:
March 28, 2002
Export Citation:
Assignee:
LEIBNIZ INST FUER FESTKOERPER (DE)
FRAUNHOFER GES FORSCHUNG (DE)
WEIHNACHT MANFRED (DE)
SCHOENECKER ANDREAS (DE)
FRAUNHOFER GES FORSCHUNG (DE)
WEIHNACHT MANFRED (DE)
SCHOENECKER ANDREAS (DE)
International Classes:
H03H9/02; (IPC1-7): H03H9/02
Other References:
HIDEAKI ADACHI: "SAW Properties of PLZT Epitaxial Thin Films", JAPANESE JOURNAL OF APPLIED PHYSICS, PUBLICATION OFFICE JAPANESE JOURNAL OF APPLIED PHYSICS. TOKYO, JP, vol. 24, no. 24, PART 1, 1985, pages 121 - 123, XP002135933, ISSN: 0021-4922
HIROYUKI ODAGAWA ET AL.: "Observation of Ferroelectric Polarization in KNbO3 Thin Films", JAPANESE JOURNAL OF APPLIED PHYSICS, SUPPLEMENTS., vol. 38, no. 5b, May 1999 (1999-05-01), JAPAN SOCIETY OF APPLIED PHYSICS. TOKYO., JA, pages 3275 - 3278, XP002210905, ISSN: 0021-4922
HIROYUKI ODAGAWA ET AL.: "Observation of Ferroelectric Polarization in KNbO3 Thin Films", JAPANESE JOURNAL OF APPLIED PHYSICS, SUPPLEMENTS., vol. 38, no. 5b, May 1999 (1999-05-01), JAPAN SOCIETY OF APPLIED PHYSICS. TOKYO., JA, pages 3275 - 3278, XP002210905, ISSN: 0021-4922
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