Title:
SURFACE ACOUSTIC WAVE DEVICE INCORPORATING A THIN LAYER OF METAL MATERIAL
Document Type and Number:
WIPO Patent Application WO/2023/222282
Kind Code:
A1
Abstract:
A surface wave device (200) comprising a substrate (210); a piezoelectric layer (240) above an upper face of the substrate; a pair of electrodes (250A, 250B) in contact with the piezoelectric layer, the two electrodes including fingers (252A, 252B) extending in the same direction so as to form a periodic structure in which the fingers of the two electrodes alternate with each other, and having an interdigital distance (2p) separating the centers of two adjacent fingers of the same electrode; a metal layer (220) interposed between the substrate and the piezoelectric layer; and a dielectric layer (230) interposed between the metal layer and the piezoelectric layer, wherein the metal layer has a thickness of 5 nm to 100 nm and the dielectric layer has a thickness of 25 nm to 600 nm.
Inventors:
BALLANDRAS SYLVAIN (FR)
LAROCHE THIERRY (FR)
CLAIRET ALEXANDRE (FR)
MICHOULIER ERIC (FR)
LAROCHE THIERRY (FR)
CLAIRET ALEXANDRE (FR)
MICHOULIER ERIC (FR)
Application Number:
PCT/EP2023/057115
Publication Date:
November 23, 2023
Filing Date:
March 21, 2023
Export Citation:
Assignee:
SOITEC SILICON ON INSULATOR (FR)
International Classes:
H03H9/02; H10N30/87; H10N30/01; H10N30/85
Foreign References:
| US20150303371A1 | 2015-10-22 | |||
| US20200044138A1 | 2020-02-06 | |||
| JP2014033210A | 2014-02-20 | |||
| US10938367B2 | 2021-03-02 |
Other References:
P. VENTURAJ. M. HODEM. SOLALJ. DESBOISJ. RIBBE: "Numerical Method for SAW propagation cha-racterization", PROC. OF THE IEEE ULTRASONICS SYMPOSIUM, 1998, pages 175 - 186
S. BALLANDRASA. REINHARDTV. LAUDEA. SOUFYANES. CAMOUW. DANIAUT. PASTUREAUDW. STEICHENR. LARDATM. SOLAL: "Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary element intégral formulation", JOURNAL OF APPLIED PHYSICS, vol. 96, no. 12, 2004, pages 7731 - 7741
S. BALLANDRASA. REINHARDTV. LAUDEA. SOUFYANES. CAMOUW. DANIAUT. PASTUREAUDW. STEICHENR. LARDATM. SOLAL: "Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary element intégral formulation", JOURNAL OF APPLIED PHYSICS, vol. 96, no. 12, 2004, pages 7731 - 7741
Attorney, Agent or Firm:
IP TRUST (FR)
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