Title:
SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/238873
Kind Code:
A1
Abstract:
A surface acoustic wave device includes a substrate that has a top surface and that contains a plurality of protrusions protruding from the top surface and spaced apart from each other, an intermediate layer disposed on the substrate so as to fill a recess formed among the protrusions, a piezoelectric layer disposed on the intermediate layer opposite to the substrate, and an electrode layer disposed on the piezoelectric layer opposite to the intermediate layer.
Inventors:
TAKAOKA YOSHIAKI (JP)
FANG MING-HUI (CN)
FANG MING-HUI (CN)
Application Number:
PCT/CN2021/095543
Publication Date:
December 02, 2021
Filing Date:
May 24, 2021
Export Citation:
Assignee:
XIAMEN SANAN INTEGRATED CIRCUIT CO LTD (CN)
SANAN JAPAN TECH CORPORATION (JP)
FUJIAN JINGAN OPTOELECTRONICS CO LTD (CN)
SANAN JAPAN TECH CORPORATION (JP)
FUJIAN JINGAN OPTOELECTRONICS CO LTD (CN)
International Classes:
H03H9/145
Domestic Patent References:
| WO2011132443A1 | 2011-10-27 |
Foreign References:
| CN111740719A | 2020-10-02 | |||
| JP2006222512A | 2006-08-24 | |||
| US20090212659A1 | 2009-08-27 |
Attorney, Agent or Firm:
TIE CHI PATENT FIRM (CN)
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