Title:
SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/138328
Kind Code:
A1
Abstract:
Provided is a surface acoustic wave device whereby breakage of IDT electrodes and peeling of the IDT electrodes off from a piezoelectric layer can be suppressed. A surface acoustic wave device 10 is provided with: a support member 13; a piezoelectric layer 14; an IDT electrode 25 having a first and a second busbar 26, 27, and pluralities of first and second electrode digits 28, 29; and a first insulating film 17A that is provided atop the piezoelectric layer 14 and that covers the tip sections of the plurality of second electrode digits 29. In a laminate of a support member 13 and a piezoelectric layer 14, a cavity area 13c is provided more toward the support-member 13 than the piezoelectric layer 14. When the direction in which the pluralities of electrode digits extend is an electrode-digit extension direction, in plan view, the outer peripheral rim of the cavity area 13 contains a first and a second outer-peripheral rim section 13d, 13e that oppose each other along the electrode-digit extension direction; the first outer-peripheral rim section 13d is located on the first busbar 26 side; and the first insulating film 17A extends toward the first busbar 26 and, in plan view, overlaps the first outer-peripheral rim section 13d of the cavity area 13c.
Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2021/046049
Publication Date:
June 30, 2022
Filing Date:
December 14, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2018051846A1 | 2018-03-22 |
Foreign References:
| US20200373910A1 | 2020-11-26 | |||
| JP2017204729A | 2017-11-16 | |||
| JP2013528996A | 2013-07-11 | |||
| JP2017538365A | 2017-12-21 | |||
| US20190074813A1 | 2019-03-07 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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