SURFACE ACOUSTIC WAVE DEVICES BASED ON UNPOLISHED NANOCRYSTALLINE DIAMOND

Title:

SURFACE ACOUSTIC WAVE DEVICES BASED ON UNPOLISHED NANOCRYSTALLINE DIAMOND

Document Type and Number:

WIPO Patent Application WO2003065575

Kind Code:

A3

Abstract:

Surface Acoustic Wave (SAW) devices with an unpolished or nominally polished nanocrystalline diamond film, metal electrodes and piezoelectric composition coatings are described. The devices are used as radiofrequency and microwave filters.

Inventors:

BI BAOKANG
GOLDING BRAGE
HUANG WEN-SHIN
ASMUSSEN JES

Application Number:

PCT/US2003/000838

Publication Date:

December 18, 2003

Filing Date:

January 13, 2003

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Assignee:

UNIV MICHIGAN STATE (US)

International Classes:

H03H9/02; (IPC1-7): H01L31/0312

Other References:

YAMANOUCHI ET AL.: "Saw propagation characteristics and fabrication technology of piezoelectric thin film/diamond structure", ULTRASONIC SYMPOSIUM, IEEE, 1989, pages 351 - 354, XP002935819
KRAUSS ET AL.: "Cold cathode electron emission properties of nanocrystalline diamond thin films", 1998, pages 186 - 187, XP010312013

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