Title:
SURFACE ACOUSTIC WAVE ELEMENT AND COMPOUND MODULE PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2013/115115
Kind Code:
A1
Abstract:
The objective of the present invention is to suppress deterioration of filter characteristics of a surface acoustic wave element as a result of bulk waves. The surface acoustic wave element includes a piezoelectric substrate (10) upon which interdigitated electrodes (16) have been formed upon one main surface (12) thereof, an insulating layer (18) formed around the interdigitated electrodes (16), a cover layer (20) disposed above the insulating layer (18) and the interdigitated electrodes (16), and pillar-shaped electrodes (22) which penetrate through the insulating layer (18) and the cover layer (20) and are connected to the interdigitated electrodes (16) via connecting wires (21). A buffer layer (26) is disposed upon the other main surface (14) of the piezoelectric substrate.
Inventors:
TAKEMURA TADAJI (JP)
Application Number:
PCT/JP2013/051696
Publication Date:
August 08, 2013
Filing Date:
January 28, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H9/145
Foreign References:
| JP2007259410A | 2007-10-04 | |||
| JP2007243915A | 2007-09-20 | |||
| JP2012015767A | 2012-01-19 | |||
| JPS63196106A | 1988-08-15 |
Attorney, Agent or Firm:
OKADA, MASAHIRO (JP)
Zenkei Okada (JP)
Zenkei Okada (JP)
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Claims: