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Patent Searching and Data


Title:
SURFACE ACOUSTIC WAVE MATERIAL AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/174097
Kind Code:
A1
Abstract:
A surface acoustic wave material and a manufacturing method therefor belong to the field of surface acoustic wave materials. The surface acoustic wave material comprises a silicon substrate (13), a silicon-based thin film (12) on the silicon substrate (13), and a piezoelectric single crystal thin film (11) on the silicon-based thin film (12). The piezoelectric single crystal thin film (11) is a lithium tantalate piezoelectric single crystal thin film or a lithium niobate piezoelectric single crystal thin film. An array of a trench structure (111, 121, 131) is formed on a bonding surface of the silicon-based thin film (12) or a bonding surface of the piezoelectric single crystal thin film (11) or a bonding surface of the silicon substrate (13). The bonding surface of the silicon-based thin film (12), the bonding surface of the piezoelectric single crystal thin film (11) and the bonding surface of the silicon substrate (13) are all polished surfaces. The problem of the existing multi-layer bonded piezoelectric material body wave affecting the surface acoustic wave and resulting in poor high-end suppression of the surface acoustic wave filter is solved. The effects of expanding the application range of a multi-layer bonded piezoelectric material and ensuring the performance of a surface acoustic wave filter are achieved.C

Inventors:
WANG WEIBIAO (CN)
MAO HONGQING (CN)
LU ZENGTIAN (CN)
LI ZHUANG (CN)
Application Number:
PCT/CN2018/083262
Publication Date:
September 19, 2019
Filing Date:
April 17, 2018
Export Citation:
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Assignee:
SHOULDER ELECTRONICS LTD (CN)
International Classes:
H03H9/02
Foreign References:
CN106961258A2017-07-18
CN104868873A2015-08-26
CN107241077A2017-10-10
CN106979830A2017-07-25
CN106154186A2016-11-23
EP1768256B12017-01-04
Attorney, Agent or Firm:
WUXI HUAYUAN PATENT AND TRADEMARK AGENCY (GENERAL PARTNERSHIP) (CN)
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