SURFACE ACOUSTIC WAVE RESONATOR AND PRODUCTION METHOD THEREFOR - NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH

Title:

SURFACE ACOUSTIC WAVE RESONATOR AND PRODUCTION METHOD THEREFOR

Document Type and Number:

WIPO Patent Application WO/2022/022264

Kind Code:

A1

Abstract:

A surface acoustic wave resonator and a production method therefor. The surface acoustic wave resonator comprises: a substrate (1) and a piezoelectric layer (2) configured on the substrate (1); interdigital transducers (3), configured on the upper surface of the piezoelectric layer (2); and a first dielectric layer (41), provided in a gap between the interdigital transducers (3), and a first cavity (5), provided between the lower surface of at least part of the first dielectric layer (41) and the upper surface of the piezoelectric layer (2). By providing the first cavity (5) on the side of the first dielectric layer (41) proximate to the piezoelectric layer (2), the first dielectric layer (41) in the gap between the interdigital transducers (3) is suspended, so that acoustic waves propagated to the suspension position of the first dielectric layer (41) along the surface of the piezoelectric layer (2) are reflected back, and thus the loss of the acoustic waves is reduced; by segmenting the first cavity (5) into a plurality of sub-first cavities by means of the interdigital transducers (3), the part of the surface of the interdigital transducers (3) proximate to the piezoelectric layer (2) is exposed in the air, so that clutter at the boundary of the interdigital transducers (3) is eliminated, and thus the overall performance of the resonator is improved.

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Inventors:

HUANG HERB HE (CN)
LI WEI (CN)
LUO HAILONG (CN)

Application Number:

PCT/CN2021/105646

Publication Date:

February 03, 2022

Filing Date:

July 12, 2021

Export Citation:

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Assignee:

NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)

International Classes:

H03H9/25

Foreign References:

CN208209911U	2018-12-07
CN106961258A	2017-07-18
CN111371426A	2020-07-03
CN110572137A	2019-12-13
US20050018019A1	2005-01-27
US20190386637A1	2019-12-19

Attorney, Agent or Firm:

BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)

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