Title:
SURFACE CHARACTERISTIC INSPECTION DEVICE AND SURFACE CHARACTERISTIC INSPECTION PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/117301
Kind Code:
A1
Abstract:
The present invention makes it easy to position a detection instrument when detecting surface characteristics of a specimen, and comprises: a detection instrument that irradiates the specimen with light and detects light reflected from the specimen; a processing unit that processes data from the detection instrument and calculates surface characteristics; a guidance information generation unit that generates information pertaining to the distance and/or the attitude of the detection instrument with respect to the specimen; and a reporting unit that reports the information pertaining to the distance and/or the attitude generated by the guidance information generation unit.
Inventors:
NAGAOKA EIICHI (JP)
Application Number:
PCT/JP2018/046161
Publication Date:
June 20, 2019
Filing Date:
December 14, 2018
Export Citation:
Assignee:
HORIBA LTD (JP)
International Classes:
G01N21/57; G01B11/24
Foreign References:
| JPH07270238A | 1995-10-20 | |||
| JP2010066273A | 2010-03-25 | |||
| JP2010127661A | 2010-06-10 | |||
| JP2016038222A | 2016-03-22 | |||
| JP2017129561A | 2017-07-27 | |||
| JP2006284550A | 2006-10-19 | |||
| JP2000131243A | 2000-05-12 | |||
| JP2009080044A | 2009-04-16 | |||
| US20050030542A1 | 2005-02-10 | |||
| JP2010127661A | 2010-06-10 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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