Title:
SURFACE CHARACTERISTICS INSPECTION DEVICE AND MACHINE LEARNING DEVICE FOR SURFACE CHARACTERISTICS INSPECTION
Document Type and Number:
WIPO Patent Application WO/2020/121594
Kind Code:
A1
Abstract:
The present invention accurately detects the surface characteristics of a specimen. The present invention comprises a light emission part 2 that emits light at a specimen W, an imaging part 3 that captures an image of reflected light from the specimen W, an image processing part 4 that performs a nonlinear transformation on the image captured by the imaging part 3 and thereby generates a transformed image, and a surface characteristics calculation part 5 that uses the transformed image to calculate the surface characteristics of the specimen.
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Inventors:
NAGAOKA EIICHI (JP)
Application Number:
PCT/JP2019/031698
Publication Date:
June 18, 2020
Filing Date:
August 09, 2019
Export Citation:
Assignee:
HORIBA LTD (JP)
International Classes:
G01N21/17; G01B11/24; G01B11/30; G01N21/55; G01N21/57
Domestic Patent References:
| WO2019117301A1 | 2019-06-20 |
Foreign References:
| US20170109874A1 | 2017-04-20 | |||
| US20160274022A1 | 2016-09-22 | |||
| JPH0777416A | 1995-03-20 | |||
| JP2006177937A | 2006-07-06 | |||
| JP2005351645A | 2005-12-22 | |||
| JP2010230450A | 2010-10-14 | |||
| US20080008375A1 | 2008-01-10 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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