SURFACE EMITTING LASER ELEMENT AND ITS MANUFACTURING METHOD, AND SURFACE EMITTING LASER ARRAY AND ITS MANUFACTURING METHOD

Title:

SURFACE EMITTING LASER ELEMENT AND ITS MANUFACTURING METHOD, AND SURFACE EMITTING LASER ARRAY AND ITS MANUFACTURING METHOD

Document Type and Number:

WIPO Patent Application WO/2008/018220

Kind Code:

A1

Abstract:

A method for manufacturing a surface emitting laser element (1) comprises a step of preparing conductive GaN composite region substrate including a high-dislocation density high-conductivity region (10a), a low-dislocation density high-conductivity region (10b), and low-dislocation density low-conductivity region (10c) as a conductive GaN substrate (10), a semiconductor layer multilayer-body fabricating step of fabricating III-V group compound semiconductor layer multilayer bodies (20) including a light-emitting layer (200) on the substrate, and an electrode forming step of forming a semiconductor-side electrode (15) and a substrate-side electrode (11). The method is characterized in that the semiconductor layer and the electrodes are so formed that the light-emitting region (200a) which is formed in the light-emitting layer (200) and into which carriers flows is in the upper portion of the low-dislocation density high-conductivity region (10b). Thus, a surface emitting laser element where light emission from the light-emitting region is uniform can be produced with high production yield.

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Inventors:

MATSUBARA, Hideki (1-3, Shimaya 1-chome, Konohana-k, Osaka-shiOsaka 24, 5540024, JP)
松原秀樹 (〒24 大阪府大阪市此花区島屋一丁目１番３号住友電気工業株式会社大阪製作所内 Osaka, 5540024, JP)
SAITO, Hirohisa (1-3, Shimaya 1-chome, Konohana-k, Osaka-shiOsaka 24, 5540024, JP)
齊藤裕久 (〒24 大阪府大阪市此花区島屋一丁目１番３号住友電気工業株式会社大阪製作所内 Osaka, 5540024, JP)

Application Number:

JP2007/060366

Publication Date:

February 14, 2008

Filing Date:

May 21, 2007

Export Citation:

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Assignee:

SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku, Osaka-sh, Osaka 41, 5410041, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
MATSUBARA, Hideki (1-3, Shimaya 1-chome, Konohana-k, Osaka-shiOsaka 24, 5540024, JP)
松原秀樹 (〒24 大阪府大阪市此花区島屋一丁目１番３号住友電気工業株式会社大阪製作所内 Osaka, 5540024, JP)
SAITO, Hirohisa (1-3, Shimaya 1-chome, Konohana-k, Osaka-shiOsaka 24, 5540024, JP)

International Classes:

H01S5/183; H01S5/323

Attorney, Agent or Firm:

FUKAMI, Hisao et al. (Fukami Patent Office, Nakanoshima Central Tower 22nd Floor, 2-7, Nakanoshima 2-chome, Kita-k, Osaka-shi Osaka 05, 5300005, JP)

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