Title:
SURFACE-GEOMETRY MEASUREMENT METHOD AND DEVICE USED THEREIN
Document Type and Number:
WIPO Patent Application WO/2014/185133
Kind Code:
A1
Abstract:
This invention provides a technology whereby the surface geometry of an object being inspected can be measured non-destructively, without contact, with high precision, and with a wide dynamic range for angle of inclination. White light interferometry using a two-beam interferometer is performed, and the surface orientation of a reference plane is made to be able to be changed with respect to the axis of light incident thereon. While changing the relative surface orientation of said reference plane with respect to the local surface orientation at a given position on a surface being inspected, a plurality of interferograms generated by interference between light reflected from the surface being inspected and light reflected from the reference plane are acquired, and the surface geometry of the surface being inspected is measured by determining, from said interferograms, the local surface orientation of the surface being inspected.
Inventors:
MATSUI SHIGERU (JP)
ONODA YUGO (JP)
ONODA YUGO (JP)
Application Number:
PCT/JP2014/056092
Publication Date:
November 20, 2014
Filing Date:
March 10, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01B11/24
Foreign References:
| JP3295846B2 | 2002-06-24 | |||
| JP2006258557A | 2006-09-28 | |||
| JPH05240628A | 1993-09-17 | |||
| US5398113A | 1995-03-14 | |||
| JP2006242853A | 2006-09-14 |
Other References:
ATSUSHI SATO: "Advanced Metrology of Surface Texture by Scanning White Light Interferometry", THE JOURNAL OF THE SURFACE FINISHING SOCIETY OF JAPAN, vol. 57, no. 8, 2006, pages 554 - 558
YOHAN KONDO: "A survey on surface metrology for flatness standard", AIST BULLETIN OF METROLOGY, vol. 8, no. 3, September 2011 (2011-09-01), pages 299 - 310
YOHAN KONDO: "A survey on surface metrology for flatness standard", AIST BULLETIN OF METROLOGY, vol. 8, no. 3, September 2011 (2011-09-01), pages 299 - 310
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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