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Title:
A SURFACE IMPROVEMENT METHOD IN FABRICATING HIGH TEMPERATURE SUPERCONDUCTOR DEVICES
Document Type and Number:
WIPO Patent Application WO/2004/059752
Kind Code:
A1
Abstract:
A method of surface improvement in fabricating High Temperature Superconductor devices, charactered in that bombarding the pref ormed material surface with an particle beam having energy, to increase the smoothness of material surface and change the structure organization or internal defect of the processed material wherein the energy of this particle beam having energy is in the range of 5ev to 50000ev, and the angle of incidence is in the range of 5 degree to 85 degree. In some casesin order to achieve the desired superconductivity, the bombarded sample should also be annealed, and the anneal temperature is in the range of 100 °C to 1500'C. The present invention can improve the surface smoothness of the processed material, reduce the surface defect, change the structure organization of the material, and thereby improve the superconductivity of the whole device. The bombarded material comprises a substrate, a transition layer, and a superconducting layer and any combination of them during the process of the fabrication of the superconductor devices.

Inventors:
HAN ZHENGHE (CN)
WANG SANSHENG (CN)
WU KAI (CN)
LIU MENGLIN (CN)
Application Number:
PCT/CN2003/000594
Publication Date:
July 15, 2004
Filing Date:
July 24, 2003
Export Citation:
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Assignee:
UNIV TSINGHUA (CN)
HAN ZHENGHE (CN)
WANG SANSHENG (CN)
WU KAI (CN)
LIU MENGLIN (CN)
International Classes:
H01L39/24; (IPC1-7): H01L39/00
Foreign References:
US6251835B12001-06-26
CN1171635A1998-01-28
Other References:
HEBARD ET AL: "Ion beam thinning and polishing of yba2cu3o7", APPL. PHYS.LETT, vol. 55, no. 18, 30 October 1989 (1989-10-30), pages 1915 - 1917, XP000099966, DOI: doi:10.1063/1.102331
Attorney, Agent or Firm:
NTD PATENT & TRADEMARK AGENCY LIMITED BEIJING OFFICE (Block A Investment Plaza 27 Jinrongdajie, Beijing 2, CN)
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